Inventor · disambiguated record
Terry Phelan
Also filed as: PHELAN TERRY J
0 granted patents·2 pending applications·0 citations·filing 2004–2004
Files withKIM JAEYEON1
Top patents by PatentIndex Score
2 records- 0140US2007056688A1Methods of treating deposition process components to form particle traps, and deposition process components having particle traps thereonKIM JAEYEON·Filed 2004·Application pending·0 cites
- 0239US2004206804A1Traps for particle entrapment in deposition chambersFiled 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →