Inventor · disambiguated record
Teng-Chao David Tao
Also filed as: TAO TENG CHAO D · TAO TENG-CHAO · TAO TENG-CHAO DAVID
4 granted patents·66 citations·filing 2006–2018
72Inventor score
Top patents by PatentIndex Score
4 records- 0191US8422193B2Annulus clamping and backside gas cooled electrostatic chuckTAO TENG CHAO D·Filed 2006·Granted Apr 16, 2013·58 cites·25 claims
- 0273US7629597B2Deposition reduction system for an ion implanterAXCELIS TECH INC·Filed 2006·Granted Dec 8, 2009·6 cites·18 claims
- 0361US9036326B2Gas bearing electrostatic chuckLEE WILLIAM DAVID·Filed 2008·Granted May 19, 2015·2 cites·19 claims
- 0446US10580616B2System and method for in-situ beamline film stabilization or removal in the AEF regionAXCELIS TECH INC·Filed 2018·Granted Mar 3, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →