Inventor · disambiguated record
Terry R. Turner
Also filed as: TURNER TERRY R · TURNER TERRY RICHARD
10 granted patents·5 pending applications·1,461 citations·filing 1994–2024
92Inventor score
Files withTURNER TERRY R3FORTH RITE TECH LLC2IFIRE TECHNOLOGIES INC2TEXAS INSTRUMENTS INC2ADVANCED ENERGY IND INC1
Top patents by PatentIndex Score
15 records- 0197US5939886APlasma monitoring and control method and systemADVANCED ENERGY IND INC·Filed 1996·Granted Aug 17, 1999·573 cites·14 claims
- 0295US5576629APlasma monitoring and control method and systemFOURTH STATE TECHNOLOGY INC·Filed 1994·Granted Nov 19, 1996·717 cites·43 claims
- 0392US6794272B2Wafer thinning using magnetic mirror plasmaIFIRE TECHNOLOGIES INC·Filed 2003·Granted Sep 21, 2004·93 cites·19 claims
- 0484US8010084B2RF power delivery diagnostic systemTURNER ENTPR & ASSOCIATES·Filed 2008·Granted Aug 30, 2011·11 cites·5 claims
- 0582US7345428B2Transducer package for process controlTURNER TERRY R·Filed 2003·Granted Mar 18, 2008·24 cites·16 claims
- 0674US7403764B2RF power delivery diagnostic systemTURNER TERRY R·Filed 2004·Granted Jul 22, 2008·10 cites·34 claims
- 0763US2025191879A1System and method for enhanced rf power delivery using harmonic waveform synthesisFORTH RITE TECH LLC·Filed 2024·Application pending·0 cites
- 0859US7118992B2Wafer thinning using magnetic mirror plasmaIFIRE TECHNOLOGIES INC·Filed 2004·Granted Oct 10, 2006·6 cites·20 claims
- 0951US5746835ARetractable probe system with in situ fabrication environment process parameter sensingTEXAS INSTRUMENTS INC·Filed 1994·Granted May 5, 1998·14 cites·10 claims
- 1048US7728250B2RF sensor clamp assemblyINFICON INC·Filed 2004·Granted Jun 1, 2010·2 cites·48 claims
- 1147US5716878ARetractable probe system with in situ fabrication environment process parameter sensingTEXAS INSTRUMENTS INC·Filed 1997·Granted Feb 10, 1998·11 cites·10 claims
- 1245US2023352284A1System and method for detecting excursion in plasma processingFORTH RITE TECH LLC·Filed 2023·Application pending·0 cites
- 1343US2009261839A1Effluent impedance based endpoint detectionTURNER TERRY R·Filed 2009·Application pending·0 cites
- 1440US2019043700A1Effluent impedance based endpoint detectionFORTH RITE TECH·Filed 2018·Application pending·0 cites
- 1535US2003082847A1Method and apparatus for wafer thinningFIRE TECHNOLOGIES INC I·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →