Inventor · disambiguated record

Thom Kobayashi

Also filed as: KOBAYASHI THOM

1 granted patent·44 citations·filing 1997–1997

48Inventor score

Technology areasH10P

Files withMOTOROLA INC1

Top patents by PatentIndex Score

1 record

0171US6045435ALow selectivity chemical mechanical polishing (CMP) process for use on integrated circuit metal interconnectsMOTOROLA INC·Filed 1997·Granted Apr 4, 2000·44 cites·18 claims

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