Inventor · disambiguated record
Thomas E. Sandwick
Also filed as: SANDWICK THOMAS · SANDWICK THOMAS E · SANDWICK THOMAS EDWIN
5 granted patents·422 citations·filing 1992–1997
85Inventor score
Top patents by PatentIndex Score
5 records- 0192US6020264AMethod and apparatus for in-line oxide thickness determination in chemical-mechanical polishingIBM·Filed 1997·Granted Feb 1, 2000·141 cites·22 claims
- 0291US5262354ARefractory metal capped low resistivity metal conductor lines and viasSIEMENS AG·Filed 1992·Granted Nov 16, 1993·187 cites·17 claims
- 0385US5640242AAssembly and method for making in process thin film thickness measurmentsIBM·Filed 1996·Granted Jun 17, 1997·72 cites·10 claims
- 0446US5935869AMethod of planarizing semiconductor wafersIBM·Filed 1997·Granted Aug 10, 1999·14 cites·8 claims
- 0535US5897425AVertical polishing tool and methodIBM·Filed 1997·Granted Apr 27, 1999·8 cites·67 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →