Inventor · disambiguated record
Thomas M. Wagner
Also filed as: WAGNER THOMAS M
7 granted patents·40 citations·filing 1998–2007
82Inventor score
Files withIBM7
Top patents by PatentIndex Score
7 records- 0167US6162565ADilute acid rinse after develop for chrome etchIBM·Filed 1998·Granted Dec 19, 2000·22 cites·26 claims
- 0263US7014959B2CD uniformity of chrome etch to photomask processIBM·Filed 2003·Granted Mar 21, 2006·8 cites·27 claims
- 0357US7304000B2Photoresist trimming processIBM·Filed 2004·Granted Dec 4, 2007·5 cites·10 claims
- 0454US6758912B2Method of inhibiting contaminants using dilute acid rinseIBM·Filed 2002·Granted Jul 6, 2004·3 cites·13 claims
- 0552US7960288B2Photoresist trimming processIBM·Filed 2007·Granted Jun 14, 2011·0 cites·7 claims
- 0652US7955988B2Photoresist trimming processIBM·Filed 2007·Granted Jun 7, 2011·0 cites·4 claims
- 0750US6494966B2Method of minimizing contaminating deposits using dilute acid rinseIBM·Filed 2000·Granted Dec 17, 2002·2 cites·11 claims
Join the waitlist — get patent alerts
Get an alert when Thomas M. Wagner files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →