Inventor · disambiguated record
Thomas Wirnsberger
Also filed as: WIRNSBERGER THOMAS
17 granted patents·1 pending application·32 citations·filing 2009–2021
90Inventor score
Top patents by PatentIndex Score
18 records- 0180US8646767B2Device for holding wafer shaped articlesKUMNIG FRANZ·Filed 2010·Granted Feb 11, 2014·8 cites·15 claims
- 0279US9044794B2Ultrasonic cleaning fluid, method and apparatusHOLSTEYNS FRANK LUDWIG·Filed 2009·Granted Jun 2, 2015·8 cites·8 claims
- 0377US11195730B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2019·Granted Dec 7, 2021·2 cites·10 claims
- 0475US9418883B2Device for holding wafer shaped articlesLAM RES AG·Filed 2013·Granted Aug 16, 2016·3 cites·18 claims
- 0573US8490634B2Device for treating disc-like articlesOBWEGER RAINER·Filed 2010·Granted Jul 23, 2013·3 cites·16 claims
- 0670US11566337B2Substrate locking system, device and procedure for chemical and/or electrolytic surface treatmentSEMSYSCO GMBH·Filed 2020·Granted Jan 31, 2023·0 cites·13 claims
- 0770US8833380B2Device for treating disc-like articlesOBWEGER RAINER·Filed 2011·Granted Sep 16, 2014·2 cites·11 claims
- 0868US11164748B2Method and device for plating a recess in a substrateSEMSYSCO GMBH·Filed 2019·Granted Nov 2, 2021·1 cites·12 claims
- 0966US8709165B2Method and apparatus for surface treatment using inorganic acid and ozoneOKORN-SCHMIDT HARALD·Filed 2010·Granted Apr 29, 2014·2 cites·7 claims
- 1064US11908698B2Method and device for plating a recess in a substrateSEMSYSCO GMBH·Filed 2021·Granted Feb 20, 2024·0 cites·18 claims
- 1161US10490426B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2014·Granted Nov 26, 2019·1 cites·29 claims
- 1261US10269615B2Apparatus for treating surfaces of wafer-shaped articlesTSCHINDERLE ULRICH·Filed 2011·Granted Apr 23, 2019·1 cites·20 claims
- 1358US9633890B2Device for treating surfaces of wafer-shaped articles and gripping pin for use in the deviceTSCHINDERLE ULRICH·Filed 2011·Granted Apr 25, 2017·1 cites·18 claims
- 1451US11965263B2Substrate holding and locking system for chemical and/or electrolytic surface treatmentSEMSYSCO GMBH·Filed 2020·Granted Apr 23, 2024·0 cites·16 claims
- 1551US9653328B2Method and apparatus for surface treatment using inorganic acid and ozoneOKORN-SCHMIDT HARALD·Filed 2014·Granted May 16, 2017·0 cites·14 claims
- 1649US10056287B2Apparatus for treating surfaces of wafer-shaped articlesLAM RES AG·Filed 2015·Granted Aug 21, 2018·0 cites·19 claims
- 1736US9887120B2Apparatus for treating surfaces of wafer-shaped articlesLAM RES AG·Filed 2015·Granted Feb 6, 2018·0 cites·14 claims
- 1835US2013101372A1Method and apparatus for processing wafer-shaped articlesTSCHINDERLE ULRICH·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →