Inventor · disambiguated record
Tillmann Ehrenberg
Also filed as: EHRENBERG TILLMANN
4 granted patents·1 pending application·4 citations·filing 2008–2008
61Inventor score
Files withVISTEC SEMICONDUCTOR SYS GMBH5
Top patents by PatentIndex Score
5 records- 0158US7906978B2Device for measuring or inspecting substrates of the semiconductor industryVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Mar 15, 2011·2 cites·17 claims
- 0243US7948635B2Method for determining positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted May 24, 2011·0 cites·9 claims
- 0343US7817262B2Device for measuring positions of structures on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Oct 19, 2010·2 cites·12 claims
- 0436US7872763B2Device for measuring the position of at least one structure on a substrateVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Granted Jan 18, 2011·0 cites·6 claims
- 0535US2009126525A1Apparatus and method for supporting a substrate at a position with high precisionVISTEC SEMICONDUCTOR SYS GMBH·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →