Inventor · disambiguated record
Tiharu Kato
Also filed as: KATO TIHARU
5 granted patents·91 citations·filing 1983–1988
81Inventor score
Top patents by PatentIndex Score
5 records- 0183US4914006APositive resist quaternary ammonium hydroxide containing developer with cationic and nonionic surfactantTOSHIBA KK·Filed 1988·Granted Apr 3, 1990·37 cites·2 claims
- 0263US4792534AMethod of manufacturing a semiconductor device involving sidewall spacer formationTOSHIBA KK·Filed 1986·Granted Dec 20, 1988·31 cites·5 claims
- 0351US4988609AMethod of forming micro patternsTOSHIBA KK·Filed 1988·Granted Jan 29, 1991·10 cites·6 claims
- 0442US4525523ANegative-working photoresist coating compositionKANTO KAGAKU·Filed 1983·Granted Jun 25, 1985·7 cites·8 claims
- 0533US4461825AMethod for forming resist patternTOKYO SHIBAURA ELECTRIC CO·Filed 1983·Granted Jul 24, 1984·6 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →