Inventor · disambiguated record

Timothy A. Savas

Also filed as: SAVAS TIMOTHY A

1 granted patent·1 pending application·3 citations·filing 2002–2004

21Inventor score

Technology areasG03F G03H

Files withMASSACHUSETTS INST TECHNOLOGY1 SAVAS TIMOTHY A1

Top patents by PatentIndex Score

2 records

0149US7303860B1System and method for performing multi-resolution lithographyMASSACHUSETTS INST TECHNOLOGY·Filed 2002·Granted Dec 4, 2007·3 cites·20 claims
0232US2006109532A1System and method for forming well-defined periodic patterns using achromatic interference lithographySAVAS TIMOTHY A·Filed 2004·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →