Inventor · disambiguated record
Timo Wandel
Also filed as: WANDEL TIMO
2 granted patents·2 citations·filing 2002–2007
34Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0154US7820343B2Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrateADVANCED MASK TECHNOLOGY CT GMBH·Filed 2007·Granted Oct 26, 2010·2 cites·11 claims
- 0221US6821693B2Method for adjusting a multilevel phase-shifting mask or reticleINFINEON TECHNOLOGIES AG·Filed 2002·Granted Nov 23, 2004·0 cites·17 claims
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