Inventor · disambiguated record
Tien-Wen Wang
Also filed as: WANG TIEN-WEN
5 granted patents·69 citations·filing 2004–2019
78Inventor score
Top patents by PatentIndex Score
5 records- 0184US7117058B2Automatic statistical process control (SPC) chart generation apparatus and method thereofTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 3, 2006·55 cites·24 claims
- 0282US10872793B2System and method for monitoring operation conditions of semiconductor manufacturing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 22, 2020·4 cites·20 claims
- 0378US11565365B2System and method for monitoring chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jan 31, 2023·3 cites·20 claims
- 0469US11017522B2Inspection and cleaning system and method for the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 25, 2021·1 cites·20 claims
- 0550US6980876B2Temperature-sensing wafer position detection system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Dec 27, 2005·6 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →