Inventor · disambiguated record

Tobias Bussenius

Also filed as: BUSSENIUS TOBIAS

3 granted patents·11 citations·filing 2015–2017

60Inventor score

Technology areasH10P

Files withATOTECH DEUTSCHLAND GMBH3

Top patents by PatentIndex Score

3 records

0182US10260161B2Substrate holder reception apparatusATOTECH DEUTSCHLAND GMBH·Filed 2016·Granted Apr 16, 2019·8 cites·20 claims
0269US10407793B2Substrate holder for vertical galvanic metal depositionATOTECH DEUTSCHLAND GMBH·Filed 2015·Granted Sep 10, 2019·3 cites·13 claims
0333US10832929B2Wafer-like substrate processing method and apparatusATOTECH DEUTSCHLAND GMBH·Filed 2017·Granted Nov 10, 2020·0 cites·5 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →