Inventor · disambiguated record
Tomoyasu Hata
Also filed as: HATA TOMOYASU
0 granted patents·4 pending applications·0 citations·filing 2005–2024
Files withCANON KK4
Top patents by PatentIndex Score
4 records- 0169US2025102925A1Processing apparatus and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0257US2023375942A1Method of diagnosing failure location of control apparatus, diagnostic apparatus, control apparatus, lithography apparatus, article manufacturing method, and non-transitory computer-readable storage mediumCANON KK·Filed 2023·Application pending·0 cites
- 0355US2023176548A1Control apparatus, adjusting method thereof, lithography apparatus, and article manufacturing methodCANON KK·Filed 2023·Application pending·0 cites
- 0444US2005211515A1Anti-vibration mount apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →