Inventor · disambiguated record
Tomohiko Hirano
Also filed as: HIRANO TOMOHIKO
3 granted patents·2 pending applications·13 citations·filing 1999–2021
60Inventor score
Top patents by PatentIndex Score
5 records- 0159US7834978B2Exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2006·Granted Nov 16, 2010·2 cites·5 claims
- 0255US12142450B2Photoelectric-surface electron sourceHAMAMATSU PHOTONICS KK·Filed 2021·Granted Nov 12, 2024·0 cites·18 claims
- 0347US2023290605A1Photoelectric surface electron sourceHAMAMATSU PHOTONICS KK·Filed 2021·Application pending·0 cites
- 0447US2023301122A1Photoelectric surfaceHAMAMATSU PHOTONICS KK·Filed 2021·Application pending·0 cites
- 0541US6539326B1Position detecting system for projection exposure apparatusCANON KK·Filed 1999·Granted Mar 25, 2003·11 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →