Inventor · disambiguated record
Toshiaki Hirota
Also filed as: HIROTA TOSHIAKI
5 granted patents·15 citations·filing 2015–2017
71Inventor score
Top patents by PatentIndex Score
5 records- 0195US9841670B2Support frame for pelliclesNIPPON LIGHT METAL CO·Filed 2015·Granted Dec 12, 2017·11 cites·16 claims
- 0280US10585348B2Pellicle, pellicle production method and exposure method using pellicleMITSUI CHEMICALS INC·Filed 2017·Granted Mar 10, 2020·2 cites·17 claims
- 0375US10216081B2Pellicle frame, pellicle and method of manufacturing the same, original plate for exposure and method of manufacturing the same, exposure device, and method of manufacturing semiconductor deviceMITSUI CHEMICALS INC·Filed 2015·Granted Feb 26, 2019·2 cites·21 claims
- 0453US10895805B2Pellicle manufacturing method and method for manufacturing photomask with pellicleMITSUI CHEMICALS INC·Filed 2017·Granted Jan 19, 2021·0 cites·20 claims
- 0538US10488751B2Pellicle, production method thereof, exposure methodMITSUI CHEMICALS INC·Filed 2017·Granted Nov 26, 2019·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →