Inventor · disambiguated record
Toshikazu Karino
Also filed as: KARINO TOSHIKAZU
6 granted patents·906 citations·filing 1990–1999
89Inventor score
Technology areasH10P
Files withKOKUSAI ELECTRIC CO LTD6
Top patents by PatentIndex Score
6 records- 0196US5788447ASubstrate processing apparatusKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Aug 4, 1998·246 cites·26 claims
- 0295US5387265ASemiconductor wafer reaction furnace with wafer transfer meansKOKUSAI ELECTRIC CO LTD·Filed 1992·Granted Feb 7, 1995·408 cites·14 claims
- 0389US6066210ASubstrate processing apparatus with a processing chamber, transfer chamber, intermediate holding chamber, and an atmospheric pressure sectionKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted May 23, 2000·93 cites·14 claims
- 0488US6143083ASubstrate transferring mechanismKOKUSAI ELECTRIC CO LTD·Filed 1999·Granted Nov 7, 2000·81 cites·3 claims
- 0567US5112641AWafer transfer method in vertical cvd diffusion apparatusKOKUSAI ELECTRIC CO LTD·Filed 1990·Granted May 12, 1992·45 cites·4 claims
- 0659US5217340AWafer transfer mechanism in vertical CVD diffusion apparatusKOKUSAI ELECTRIC CO LTD·Filed 1992·Granted Jun 8, 1993·33 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →