Inventor · disambiguated record
Tomokazu Kawamoto
Also filed as: KAWAMOTO TOMOKAZU
4 granted patents·2 pending applications·542 citations·filing 1997–2012
76Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0193US8393091B2Substrate processing method, and method of manufacturing semiconductor deviceKAWAMOTO TOMOKAZU·Filed 2011·Granted Mar 12, 2013·535 cites·3 claims
- 0261US8598023B2Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor deviceKAWAMOTO TOMOKAZU·Filed 2012·Granted Dec 3, 2013·1 cites·3 claims
- 0354US6835625B2Method for fabricating semiconductor deviceFUJITSU LTD·Filed 2003·Granted Dec 28, 2004·6 cites·9 claims
- 0451US2008200018A1Substrate processing apparatus, substrate processing method, and method of manufacturing semiconductor deviceFUJITSU LTD·Filed 2008·Application pending·0 cites
- 0539US7615431B2Manufacturing method of semiconductor deviceFUJITSU MICROELECTRONICS LTD·Filed 2005·Granted Nov 10, 2009·0 cites·10 claims
- 0622US2002061647A1Method for manufacturing a semiconductor device including treatment of substrate and apparatus for treatment of substrateFiled 1997·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →