Inventor · disambiguated record
Tomoharu Kawazu
Also filed as: KAWAZU TOMOHARU
3 granted patents·1 pending application·7 citations·filing 2010–2024
57Inventor score
Top patents by PatentIndex Score
4 records- 0180US9170492B2Silicon-containing film-forming composition, silicon-containing film, and pattern forming methodKAWAZU TOMOHARU·Filed 2010·Granted Oct 27, 2015·6 cites·15 claims
- 0264US10234762B2Pattern-forming methodJSR CORP·Filed 2016·Granted Mar 19, 2019·1 cites·18 claims
- 0357US12312487B2Method for forming protective film, method for manufacturing patterned substrate, and compositionJSR CORP·Filed 2023·Granted May 27, 2025·0 cites·24 claims
- 0454US2024231231A1Method for forming resist underlayer film, method for producing semiconductor substrate, composition, and resist underlayer filmJSR CORP·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →