Inventor · disambiguated record
Toyoki Kitayama
Also filed as: KITAYAMA TOYOKI
5 granted patents·1 pending application·61 citations·filing 1990–2002
75Inventor score
Top patents by PatentIndex Score
6 records- 0177US5036290ASynchrotron radiation generation apparatusHITACHI LTD·Filed 1990·Granted Jul 30, 1991·53 cites·34 claims
- 0253US6735275B2X-ray exposure method, x-ray exposure apparatus, fine structure and semiconductor deviceMITSUBISHI ELECTRIC CORP·Filed 2002·Granted May 11, 2004·4 cites·17 claims
- 0351US6947518B2X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor deviceCANON KK·Filed 2001·Granted Sep 20, 2005·3 cites·8 claims
- 0444US6760400B2Exposing method and semiconductor device fabricated by the exposing methodMITSUBISHI ELECTRIC CORP·Filed 2002·Granted Jul 6, 2004·1 cites·11 claims
- 0536US6947519B2X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructureMITSUBISHI ELECTRIC CORP·Filed 2001·Granted Sep 20, 2005·0 cites·16 claims
- 0633US2002196896A1Exposure method, exposure apparatus, X-ray mask, semiconductor device and microstructureMITSUBISHI ELECTRIC CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →