Inventor · disambiguated record
Tohru Kiuchi
Also filed as: KIUCHI TOHRU
38 granted patents·6 pending applications·506 citations·filing 1989–2024
97Inventor score
Top patents by PatentIndex Score
44 records- 0198US7433019B2Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2006·Granted Oct 7, 2008·66 cites·49 claims
- 0296US7573052B2Exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2008·Granted Aug 11, 2009·24 cites·24 claims
- 0395US5883704AProjection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical systemNIKON CORP·Filed 1996·Granted Mar 16, 1999·183 cites·46 claims
- 0491US5583609AProjection exposure apparatusNIKON CORP·Filed 1995·Granted Dec 10, 1996·92 cites·13 claims
- 0590US8235695B2Pattern forming device, pattern forming method, and device manufacturing methodKIUCHI TOHRU·Filed 2010·Granted Aug 7, 2012·6 cites·26 claims
- 0686US7872730B2Immersion exposure apparatus and immersion exposure method, and device manufacturing methodNIKON CORP·Filed 2007·Granted Jan 18, 2011·7 cites·13 claims
- 0784US6583854B1Method and apparatus for the manufacture of circuits for a large display device using stitch exposureNIKON CORP·Filed 2000·Granted Jun 24, 2003·32 cites·19 claims
- 0880US8605249B2Exposure apparatus, exposure method, and device manufacturing methodINOUE HIDEYA·Filed 2009·Granted Dec 10, 2013·4 cites·12 claims
- 0980USRE38320EProjection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical systemNIPPON KOGAKU KK·Filed 2001·Granted Nov 18, 2003·20 cites·59 claims
- 1076US8384875B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2009·Granted Feb 26, 2013·4 cites·40 claims
- 1176US8013975B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Sep 6, 2011·4 cites·19 claims
- 1275US11073767B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2020·Granted Jul 27, 2021·0 cites·5 claims
- 1373US9072210B2Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display elementNIKON CORP·Filed 2014·Granted Jun 30, 2015·2 cites·8 claims
- 1472US10691027B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2019·Granted Jun 23, 2020·0 cites·14 claims
- 1572US8440375B2Exposure method and electronic device manufacturing methodKIUCHI TOHRU·Filed 2008·Granted May 14, 2013·5 cites·32 claims
- 1671US10527945B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2019·Granted Jan 7, 2020·0 cites·12 claims
- 1771US8801307B2Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display elementKIUCHI TOHRU·Filed 2010·Granted Aug 12, 2014·2 cites·57 claims
- 1871US8289500B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2009·Granted Oct 16, 2012·2 cites·16 claims
- 1971US7220160B2Gun grip controllerCCP CO LTD·Filed 2002·Granted May 22, 2007·15 cites·8 claims
- 2069US10591827B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2018·Granted Mar 17, 2020·0 cites·6 claims
- 2169US10156795B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2018·Granted Dec 18, 2018·0 cites·13 claims
- 2265US8399263B2Method for measuring expansion/contraction, method for processing substrate, method for producing device, apparatus for measuring expansion/contraction, and apparatus for processing substrateKIUCHI TOHRU·Filed 2009·Granted Mar 19, 2013·2 cites·28 claims
- 2364US10007190B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2017·Granted Jun 26, 2018·0 cites·18 claims
- 2462US9651868B2Substrate processing apparatus, processing apparatus, and method for manufacturing deviceNIKON CORP·Filed 2013·Granted May 16, 2017·0 cites·14 claims
- 2562US5872618AProjection exposure apparatusNIKON CORP·Filed 1997·Granted Feb 16, 1999·22 cites·31 claims
- 2659US2024164012A1Metal wiring manufacturing method, transistor manufacturing method, and metal wiringNIKON CORP·Filed 2024·Application pending·0 cites
- 2756US11342206B2Substrate case and substrate accommodation apparatusNIKON CORP·Filed 2019·Granted May 24, 2022·0 cites·6 claims
- 2855US2009002660A1Exposure apparatus and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 2954US9152062B2Pattern forming device, pattern forming method, and device manufacturing methodKIUCHI TOHRU·Filed 2012·Granted Oct 6, 2015·0 cites·13 claims
- 3054US8922748B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2012·Granted Dec 30, 2014·0 cites·25 claims
- 3154US2008158531A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Application pending·0 cites
- 3253US9178155B2Flexible substrate, manufacturing method of display element, and manufacturing apparatus of display elementNARA KEI·Filed 2009·Granted Nov 3, 2015·0 cites·19 claims
- 3350US8743341B2Immersion exposure apparatus and immersion exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2010·Granted Jun 3, 2014·0 cites·8 claims
- 3450US8508714B2Exposure apparatus, exposure method, and method for producing deviceKIUCHI TOHRU·Filed 2010·Granted Aug 13, 2013·0 cites·16 claims
- 3547US9193560B2Leader member, substrate, substrate cartridge, substrate-processing apparatus, leader-connecting method, method of manufacturing display element, and apparatus for manufacturing display elementHAMADA TOMOHIDE·Filed 2012·Granted Nov 24, 2015·0 cites·26 claims
- 3647US8040490B2Liquid immersion exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2007·Granted Oct 18, 2011·0 cites·13 claims
- 3746US5162789AFluorescent indicator apparatusNIPPON DENSO CO·Filed 1989·Granted Nov 10, 1992·14 cites·6 claims
- 3845US2022082458A1Flexible sensorNIKON CORP·Filed 2021·Application pending·0 cites
- 3944US2013038172A1Motor apparatus, method of driving rotor, and robot apparatusNIKON CORP·Filed 2012·Application pending·0 cites
- 4043US10541160B2Substrate case and substrate accommodation apparatusMIZUTANI HIDEO·Filed 2010·Granted Jan 21, 2020·0 cites·17 claims
- 4142US8780326B2Exposure apparatus, exposure method, and device manufacturing methodKIUCHI TOHRU·Filed 2006·Granted Jul 15, 2014·0 cites·20 claims
- 4242US8379186B2Pattern formation apparatus, pattern formation method, and device manufacturing methodNIKON CORP·Filed 2010·Granted Feb 19, 2013·0 cites·40 claims
- 4342US8264666B2Exposure apparatus, exposure method, and method of manufacturing deviceKIUCHI TOHRU·Filed 2010·Granted Sep 11, 2012·0 cites·27 claims
- 4439US2013027684A1Exposure apparatus, substrate processing apparatus, and device manufacturing methodKIUCHI TOHRU·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →