Inventor · disambiguated record
Tomoaki Koyama
Also filed as: KOYAMA TOMOAKI
2 granted patents·1 pending application·82 citations·filing 2008–2009
58Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0190US8199454B2Electrostatic chuck and substrate temperature adjusting-fixing deviceKOYAMA TOMOAKI·Filed 2008·Granted Jun 12, 2012·82 cites·16 claims
- 0249US8068326B2Electrostatic chuck and substrate temperature control fixing apparatusKOYAMA TOMOAKI·Filed 2009·Granted Nov 29, 2011·0 cites·15 claims
- 0345US2009159590A1Substrate temperature adjusting-fixing devicesSHINKO ELECTRIC IND CO·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →