Inventor · disambiguated record
Toshinobu Morioka
Also filed as: MORIOKA TOSHINOBU
5 granted patents·124 citations·filing 1997–2000
83Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0178US6641981B1Exposure method, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2000·Granted Nov 4, 2003·35 cites·26 claims
- 0274US5973766AExposure method and exposure deviceNIKON CORP·Filed 1997·Granted Oct 26, 1999·34 cites·30 claims
- 0366US5995199APosition measurement method for measuring a position of an exposure mask and exposure method for transferring an image of the pattern formed in an exposure maskNIKON CORP·Filed 1997·Granted Nov 30, 1999·28 cites·14 claims
- 0463US6512572B1Exposure apparatus, method, and storage mediumNIKON CORP·Filed 2000·Granted Jan 28, 2003·8 cites·14 claims
- 0551US6104471AExposure apparatus and method wherein the magnification of the projection optical system compensates for physical changes in the substrateNIKON CORP·Filed 1997·Granted Aug 15, 2000·19 cites·31 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →