Inventor · disambiguated record
Toshiharu Nakashima
Also filed as: NAKASHIMA TOSHIHARU
10 granted patents·6 pending applications·386 citations·filing 1994–2023
91Inventor score
Top patents by PatentIndex Score
16 records- 0195US7102731B2Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing methodNIKON CORP·Filed 2006·Granted Sep 5, 2006·23 cites·29 claims
- 0294US5534970AScanning exposure apparatusNIKON CORP·Filed 1994·Granted Jul 9, 1996·200 cites·18 claims
- 0392US7088426B2Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing methodNIKON CORP·Filed 2004·Granted Aug 8, 2006·40 cites·35 claims
- 0482USRE37309EScanning exposure apparatusNIPPON KOGAKU KK·Filed 1998·Granted Aug 7, 2001·57 cites·60 claims
- 0580US9321092B2Method for forming steel sheet by hot pressingTAKASUE TEKKAN·Filed 2011·Granted Apr 26, 2016·9 cites·5 claims
- 0669US5976738AExposure and alignment methodNIKON CORP·Filed 1998·Granted Nov 2, 1999·26 cites·44 claims
- 0766US2024126178A1Exposure apparatus, control method, and device manufacturing methodNIKON CORP·Filed 2023·Application pending·0 cites
- 0865US2024255855A1Pattern exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2023·Application pending·0 cites
- 0960US6208406B1Environmental control apparatus for exposure apparatusNIKON CORP·Filed 1997·Granted Mar 27, 2001·17 cites·24 claims
- 1053US6281965B1Exposure method and exposure system using the exposure methodNIKON CORP·Filed 1999·Granted Aug 28, 2001·13 cites·67 claims
- 1152US2006227306A1Projection optical system adjustment method, prediction method, evaluation method, adjustment method, exposure method and exposure apparatus, program, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
- 1246US11712189B2Dipole group quantification method and dipole group display systemHIRANO RYOJI·Filed 2020·Granted Aug 1, 2023·0 cites·9 claims
- 1345US6710846B2Environmental control apparatus for exposure apparatusNIKON CORP·Filed 2001·Granted Mar 23, 2004·1 cites·15 claims
- 1444US2016224912A1Information processing apparatus, and non-transitory recording mediumMIZUHARA TAKUYA·Filed 2016·Application pending·0 cites
- 1542US2004174512A1Illumination optical apparatus, exposure apparatus and method of exposureNIKON CORP·Filed 2004·Application pending·0 cites
- 1640US2003038931A1Illumination optical apparatus, exposure apparatus and method of exposureNIKON CORP·Filed 2002·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Toshiharu Nakashima files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →