Inventor · disambiguated record
Toshiaki Otaki
Also filed as: OTAKI TOSHIAKI
5 granted patents·3 pending applications·3 citations·filing 2014–2025
64Inventor score
Files withNUFLARE TECHNOLOGY INC8
Top patents by PatentIndex Score
8 records- 0169US9410899B2Illumination apparatus and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2015·Granted Aug 9, 2016·1 cites·5 claims
- 0265US10222341B2Focusing apparatus, focusing method, and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2017·Granted Mar 5, 2019·1 cites·10 claims
- 0364US2025377602A1Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0464US2024280500A1Adjustment method of inspection apparatus focus position, and pattern inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 0561US2025305972A1Electron beam mask inspection apparatusNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0658US9036143B2Inspection apparatus and inspection methodNUFLARE TECHNOLOGY INC·Filed 2014·Granted May 19, 2015·1 cites·8 claims
- 0741US10386308B2Pattern inspection apparatus for detecting a pattern defectNUFLARE TECHNOLOGY INC·Filed 2017·Granted Aug 20, 2019·0 cites·10 claims
- 0836US10719928B2Pattern inspection apparatus and pattern inspection methodNUFLARE TECHNOLOGY INC·Filed 2016·Granted Jul 21, 2020·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →