Inventor · disambiguated record
Toshiaki Sango
Also filed as: SANGO TOSHIAKI
2 granted patents·13 citations·filing 2001–2002
57Inventor score
Technology areasH10P
Top patents by PatentIndex Score
2 records- 0155US6698469B2Cylinder cabinet and method of purging remaining gas in the pipe thereofNEC ELECTRONICS CORP·Filed 2002·Granted Mar 2, 2004·7 cites·4 claims
- 0250US6391789B2Dry etching system for patterning target layer at high reproducibility and method of dry etching used thereinNEC CORP·Filed 2001·Granted May 21, 2002·6 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →