Inventor · disambiguated record
Tomotaka Shibazaki
Also filed as: SHIBAZAKI TOMOTAKA
6 granted patents·5 pending applications·1 citations·filing 2018–2025
66Inventor score
Top patents by PatentIndex Score
11 records- 0173US2022352804A1Linear Motor for Vacuum and Vacuum Processing ApparatusHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0272US11049687B2Stage apparatus and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Jun 29, 2021·1 cites·11 claims
- 0366US11418101B2Linear motor for vacuum and vacuum processing apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Aug 16, 2022·0 cites·5 claims
- 0455US11380515B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Jul 5, 2022·0 cites·15 claims
- 0555US2025379516A1Apparatus and optional unitFUJIFILM BUSINESS INNOVATION CORP·Filed 2024·Application pending·0 cites
- 0654US10600614B2Stage device and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2018·Granted Mar 24, 2020·0 cites·17 claims
- 0753US10879033B2Stage apparatus, and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2019·Granted Dec 29, 2020·0 cites·10 claims
- 0851US10658151B2Stage device and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2019·Granted May 19, 2020·0 cites·9 claims
- 0951US2025323081A1Vacuum Processing ApparatusHITACHI HIGH TECH CORP·Filed 2025·Application pending·0 cites
- 1048US2023215684A1Stage device, and charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 1145US2024258063A1Stage Device, Charged Particle Beam Device, and Vacuum DeviceHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →