Inventor · disambiguated record
Toshimasa Shimoda
Also filed as: SHIMODA TOSHIMASA
3 granted patents·4 pending applications·38 citations·filing 2000–2009
71Inventor score
Top patents by PatentIndex Score
7 records- 0182US6499880B2Static pressure air bearingNIKON CORP·Filed 2001·Granted Dec 31, 2002·18 cites·15 claims
- 0268US6328473B1Static air-bearing and stage apparatus using the bearing and optical apparatus using the stage apparatusNIKON CORP·Filed 2000·Granted Dec 11, 2001·15 cites·19 claims
- 0355US6735867B2Method of making a static pressure air bearingNIKON CORP·Filed 2002·Granted May 18, 2004·5 cites·11 claims
- 0445US2009147228A1Exposure apparatus, manufacturing method thereof, and maintenance method of exposure apparatusNIKON CORP·Filed 2008·Application pending·0 cites
- 0545US2009190117A1Exposure apparatus, manufacturing method and supporting method thereofNIKON CORP·Filed 2009·Application pending·0 cites
- 0632US2004169832A1Vacuum chamber having instrument-mounting bulkhead exhibiting reduced deformation in response to pressure differential, and energy-beam systems comprising sameNIKON CORP·Filed 2004·Application pending·0 cites
- 0727US2003043357A1Vacuum chamber having instrument- mounting bulkhead exhibiting reduced deformation in response to pressure differential, and energy-beam systems comprising sameNIKON CORPORATOIN·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →