Inventor · disambiguated record
Toshihisa Tomie
Also filed as: TOMIE TOSHIHISA
9 granted patents·178 citations·filing 1992–2004
90Inventor score
Top patents by PatentIndex Score
9 records- 0185US6954266B2Method and apparatus for inspecting multilayer masks for defectsNAT INST OF ADVANCED IND SCIEN·Filed 2002·Granted Oct 11, 2005·29 cites·8 claims
- 0270US7576343B2Method and apparatus for generating laser produced plasmaNAT INST OF ADVANCED IND SCIEN·Filed 2004·Granted Aug 18, 2009·14 cites·34 claims
- 0364US6275565B1Laser plasma light source and method of generating radiation using the sameAGENCY IND SCIENCE TECHN·Filed 1999·Granted Aug 14, 2001·29 cites·14 claims
- 0464US5569916AElectron spectroscopy apparatusAGENCY IND SCIENCE TECHN·Filed 1995·Granted Oct 29, 1996·28 cites·14 claims
- 0561US5684852AX-ray lensAGENCY IND SCIENCE TECHN·Filed 1996·Granted Nov 4, 1997·19 cites·38 claims
- 0654US6326617B1Photoelectron spectroscopy apparatusNAT INST OF ADV IND & TECHNOL·Filed 1998·Granted Dec 4, 2001·20 cites·19 claims
- 0750US5594773AX-ray lensAGENCY IND SCIENCE TECHN·Filed 1995·Granted Jan 14, 1997·12 cites·35 claims
- 0848US5781608AX-ray exposure systemAGENCY IND SCIENCE TECHN·Filed 1997·Granted Jul 14, 1998·17 cites·20 claims
- 0946US5293396APlasma generating apparatus and method for extreme-ultaviolet laserAGENCY IND SCIENCE TECHN·Filed 1992·Granted Mar 8, 1994·10 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →