Inventor · disambiguated record
Toshio Tsukakoshi
Also filed as: TSUKAKOSHI TOSHIO
4 granted patents·1 pending application·141 citations·filing 1999–2006
81Inventor score
Files withNIKON CORP5
Top patents by PatentIndex Score
5 records- 0188US7215408B2Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer systemNIKON CORP·Filed 2005·Granted May 8, 2007·13 cites·33 claims
- 0288US6961115B2Specification determining method, projection optical system making method and adjusting method, exposure apparatus and making method thereof, and computer systemNIKON CORP·Filed 2002·Granted Nov 1, 2005·45 cites·54 claims
- 0384US7075651B2Image forming characteristics measuring method, image forming characteristics adjusting method, exposure method and apparatus, program and storage medium, and device manufacturing methodNIKON CORP·Filed 2003·Granted Jul 11, 2006·28 cites·80 claims
- 0478US6296977B1Method for the measurement of aberration of optical projection systemNIKON CORP·Filed 1999·Granted Oct 2, 2001·55 cites·27 claims
- 0541US2006285100A1Exposure apparatus and exposure method, and device manufacturing methodNIKON CORP·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →