Inventor · disambiguated record
Toshikazu Umatate
Also filed as: UMATATE TOSHIKAZU
7 granted patents·1,109 citations·filing 1986–2011
90Inventor score
Top patents by PatentIndex Score
7 records- 0198US4780617AMethod for successive alignment of chip patterns on a substrateNIPPON KOGAKU KK·Filed 1986·Granted Oct 25, 1988·666 cites·14 claims
- 0295US5243377ALithography information control systemNIKON CORP·Filed 1992·Granted Sep 7, 1993·126 cites·5 claims
- 0394US6040096AMask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatusNIKON CORP·Filed 1998·Granted Mar 21, 2000·120 cites·35 claims
- 0492US5894056AMask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatusNIKON CORP·Filed 1996·Granted Apr 13, 1999·91 cites·30 claims
- 0591US4833621AMethod of and apparatus for aligning a substrateNIKON CORP·Filed 1987·Granted May 23, 1989·76 cites·5 claims
- 0679US4958082APosition measuring apparatusNIKON CORP·Filed 1988·Granted Sep 18, 1990·30 cites·18 claims
- 0736US8795953B2Pattern forming method and method for producing deviceUMATATE TOSHIKAZU·Filed 2011·Granted Aug 5, 2014·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →