Inventor · disambiguated record
Tomoji Watanabe
Also filed as: WATANABE TOMOJI
10 granted patents·693 citations·filing 1988–2006
91Inventor score
Top patents by PatentIndex Score
10 records- 0197US6518548B2Substrate temperature control system and method for controlling temperature of substrateHITACHI LTD·Filed 2002·Granted Feb 11, 2003·269 cites·5 claims
- 0297US6394797B1Substrate temperature control system and method for controlling temperature of substrateHITACHI LTD·Filed 2000·Granted May 28, 2002·182 cites·25 claims
- 0391US5001327AApparatus and method for performing heat treatment on semiconductor wafersHITACHI LTD·Filed 1988·Granted Mar 19, 1991·146 cites·40 claims
- 0472US6403479B1Process for producing semiconductor and apparatus for productionHITACHI LTD·Filed 2000·Granted Jun 11, 2002·17 cites·14 claims
- 0569US6462411B1Semiconductor wafer processing apparatus for transferring a wafer mountKOKUSAI ELECTRIC CO LTD·Filed 1998·Granted Oct 8, 2002·40 cites·28 claims
- 0665US6656838B2Process for producing semiconductor and apparatus for productionHITACHI LTD·Filed 2002·Granted Dec 2, 2003·11 cites·4 claims
- 0760US6288368B1Vacuum heating furnace with tapered portionHITACHI LTD·Filed 2000·Granted Sep 11, 2001·6 cites·6 claims
- 0855US5235399ATemperature measuring apparatus utilizing radiationHITACHI LTD·Filed 1991·Granted Aug 10, 1993·20 cites·16 claims
- 0942US7485874B2Apparatus for manufacturing semiconductor substratesSUMCO CORP·Filed 2006·Granted Feb 3, 2009·0 cites·14 claims
- 1031US6093911AVacuum heating furnace with tapered portionHITACHI LTD·Filed 1998·Granted Jul 25, 2000·2 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →