Inventor · disambiguated record
Tony Wilby
Also filed as: WILBY TONY
4 granted patents·7 pending applications·1 citations·filing 2002–2024
56Inventor score
Top patents by PatentIndex Score
11 records- 0181US11913109B2Apparatus and a method of controlling thickness variation in a material layer formed using physical vapour depositionSPTS TECHNOLOGIES LTD·Filed 2019·Granted Feb 27, 2024·1 cites·6 claims
- 0277US2024014018A1Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour DepositionSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 0371US12492465B2PVD apparatus and methodSPTS TECHNOLOGIES LTD·Filed 2024·Granted Dec 9, 2025·0 cites·22 claims
- 0466US2025354801A1In-situ wafer stress measurement by chromatic confocal sensor scanning with temperature compensationORBOTECH LTD·Filed 2024·Application pending·0 cites
- 0566US2025354803A1In-situ wafer stress measurement by chromatic confocal sensor scanning with vibration compensationORBOTECH LTD·Filed 2024·Application pending·0 cites
- 0653US2024177997A1Method of Operating a PVD ApparatusSPTS TECHNOLOGIES LTD·Filed 2023·Application pending·0 cites
- 0751US2022085275A1Deposition MethodSPTS TECHNOLOGIES LTD·Filed 2021·Application pending·0 cites
- 0849US2023136705A1PVD Method and ApparatusSPTS TECHNOLOGIES LTD·Filed 2022·Application pending·0 cites
- 0943US11361975B2Method of fabricating integrated circuitsSPTS TECHNOLOGIES LTD·Filed 2019·Granted Jun 14, 2022·0 cites·16 claims
- 1039US12207556B2Method of depositionSPTS TECHNOLOGIES LTD·Filed 2020·Granted Jan 21, 2025·0 cites·19 claims
- 1130US2003157781A1Method of filling trenchesFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →