Inventor · disambiguated record
Tomotsugu Yano
Also filed as: YANO TOMOTSUGU
1 granted patent·3 pending applications·0 citations·filing 2018–2022
1Inventor score
Files withMERCK PATENT GMBH4
Top patents by PatentIndex Score
4 records- 0148US2022252977A1A negative tone lift off resist composition comprising an alkali soluble resin and a photo acid generator, and a method for manufacturing metal film patterns on a substrate.MERCK PATENT GMBH·Filed 2020·Application pending·0 cites
- 0246US2025044695A1Method for using composition comprising organic acid compound, lithography composition comprising organic acid compound, and method for manufacturing resist patternMERCK PATENT GMBH·Filed 2022·Application pending·0 cites
- 0338US12441822B2Polymer, semiconductor composition comprising polymer, and method for manufacturing film using semiconductor compositionMERCK PATENT GMBH·Filed 2020·Granted Oct 14, 2025·0 cites·15 claims
- 0436US2020326623A1A negative tone lift off resist composition comprising an alkali soluble resin and cross linkers and a method for manufacturing metal film patterns on a substrateMERCK PATENT GMBH·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →