Inventor · disambiguated record
Tsuneo Kanda
Also filed as: KANDA TSUNEO
6 granted patents·1 pending application·139 citations·filing 1991–2010
84Inventor score
Top patents by PatentIndex Score
7 records- 0187US5140366AExposure apparatus with a function for controlling alignment by use of latent imagesCANON KK·Filed 1991·Granted Aug 18, 1992·59 cites·22 claims
- 0278US8428763B2Management apparatus, exposure method, and method of manufacturing deviceKANDA TSUNEO·Filed 2010·Granted Apr 23, 2013·5 cites·8 claims
- 0373US5793471AProjection exposure method and apparatus in which scanning exposure is performed in accordance with a shot layout of mask patternsCANON KK·Filed 1996·Granted Aug 11, 1998·35 cites·7 claims
- 0457US5808724AIllumination method and system having a first optical element at a position optically conjugate with an object and a second optical element closer to the object and on a pupil plane of the systemCANON KK·Filed 1996·Granted Sep 15, 1998·23 cites·20 claims
- 0554US6867845B2Mask and projection exposure apparatusCANON KK·Filed 2001·Granted Mar 15, 2005·4 cites·18 claims
- 0649US6233042B1Projection exposure apparatus and device manufacturing method using the sameCANON KK·Filed 1998·Granted May 15, 2001·13 cites·13 claims
- 0747US2009170042A1Exposure apparatus and device manufacturing methodCANON KK·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →