Inventor · disambiguated record
Tsubasa Nanao
Also filed as: NANAO TSUBASA
6 granted patents·4 pending applications·3 citations·filing 2016–2025
67Inventor score
Files withNUFLARE TECHNOLOGY INC10
Top patents by PatentIndex Score
10 records- 0176US10388488B2Multi charged particle beam drawing apparatus and multi charged particle beam drawing methodNUFLARE TECHNOLOGY INC·Filed 2018·Granted Aug 20, 2019·2 cites·9 claims
- 0265US10042261B2Method of aperture alignment and multi charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2016·Granted Aug 7, 2018·1 cites·13 claims
- 0365US2025372346A1Mark position measurement method, multi-charged particle beam writing method and multi-charged particle beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0464US2025364208A1Background waveform acquisition method, mark position detection method, electron beam writing method, and electron beam writing apparatusNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0560US11740546B2Multi charged particle beam writing apparatus and method of adjusting sameNUFLARE TECHNOLOGY INC·Filed 2022·Granted Aug 29, 2023·0 cites·17 claims
- 0660US2025054727A1Beam position measurement method and charged particle beam writing methodNUFLARE TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 0760US2025336640A1Illumination lens adjustment method, multiple charged particle beam writing apparatus, and storage mediumNUFLARE TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 0853US11804360B2Multi charged particle beam adjustment method, multi charged particle beam irradiation method, and multi charged particle beam irradiation apparatusNUFLARE TECHNOLOGY INC·Filed 2020·Granted Oct 31, 2023·0 cites·9 claims
- 0943US10157723B2Multi charged particle beam writing apparatus and method of adjusting the sameNUFLARE TECHNOLOGY INC·Filed 2017·Granted Dec 18, 2018·0 cites·18 claims
- 1033US10490388B2Multibeam-focus adjusting method, multibeam-focus measuring method, and charged-particle-beam lithography apparatusNUFLARE TECHNOLOGY INC·Filed 2017·Granted Nov 26, 2019·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →