Inventor · disambiguated record
Tsung-Hsun Yu
Also filed as: YU TSUNG-HSUN
4 granted patents·1 pending application·8 citations·filing 2012–2020
62Inventor score
Top patents by PatentIndex Score
5 records- 0189US10510566B2Cluster tool techniques with improved efficiencyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 17, 2019·8 cites·20 claims
- 0256US11441221B2Method of performing atomic layer depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 13, 2022·0 cites·20 claims
- 0355US10755953B2Cluster tool techniques with improved efficiencyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 25, 2020·0 cites·20 claims
- 0443US2013269599A1Methods and Apparatus for Continuous Pressure Control ProcessingLIN CHIEN-FENG·Filed 2012·Application pending·0 cites
- 0538US10109467B2Advanced exhaust systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 23, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →