Inventor · disambiguated record
Tung Kang
Also filed as: KANG TUNG Y · KANG TUNG YAW
2 granted patents·2 pending applications·5 citations·filing 2002–2006
43Inventor score
Top patents by PatentIndex Score
4 records- 0151US6627363B1Utilizing vacuum ultraviolet (VUV) exposure to remove halos of carbon deposition in clear reticle repairTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Sep 30, 2003·5 cites·29 claims
- 0249US2007012336A1Photomask cleaning using vacuum ultraviolet (VUV) light cleaningTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 0340US2007012335A1Photomask cleaning using vacuum ultraviolet (VUV) light cleaningCHANG HSIAO C·Filed 2005·Application pending·0 cites
- 0436US7097948B2Method for repair of photomasksTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Aug 29, 2006·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →