Inventor · disambiguated record
Tutomu Ueyama
Also filed as: UEYAMA TUTOMU
3 granted patents·181 citations·filing 1986–1998
77Inventor score
Files withDAINIPPON SCREEN MFG3
Top patents by PatentIndex Score
3 records- 0188US5963753ASubstrate processing apparatusDAINIPPON SCREEN MFG·Filed 1998·Granted Oct 5, 1999·103 cites·21 claims
- 0280US6099643AApparatus for processing a substrate providing an efficient arrangement and atmospheric isolation of chemical treatment sectionDAINIPPON SCREEN MFG·Filed 1997·Granted Aug 8, 2000·61 cites·12 claims
- 0360US4751383AMethod and apparatus for detection of position with correction of errors caused by errors in scale pitchDAINIPPON SCREEN MFG·Filed 1986·Granted Jun 14, 1988·17 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →