Inventor · disambiguated record
Tzu-Jeng Hsu
Also filed as: HSU TZU JENG
7 granted patents·7 pending applications·424 citations·filing 1999–2024
84Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD6TAIWAN SEMICONDUCTOR MFG5GUDENG PREC IND CO LTD1SHENG JAIN-PING1WANG CHIEN-FENG1
Top patents by PatentIndex Score
14 records- 0195US6194104B1Optical proximity correction (OPC) method for improving lithography process windowTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Feb 27, 2001·326 cites·17 claims
- 0288US6477432B1Statistical in-process quality control sampling based on product stability through a systematic operation system and methodTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Nov 5, 2002·88 cites·20 claims
- 0379US12487531B2Extreme ultraviolet (EUV) radiation source apparatus, EUV lithography system, and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·20 claims
- 0476US8833806B2Front opening unified pod with latch structureWANG CHIEN-FENG·Filed 2012·Granted Sep 16, 2014·6 cites·20 claims
- 0569US8794444B2Large-sized front opening unified wafer PODSHENG JAIN-PING·Filed 2011·Granted Aug 5, 2014·4 cites·33 claims
- 0662US2024369939A1Extreme ultraviolet (euv) radiation source apparatus, euv lithography system, and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0757US2010126531A1Method and apparatus for cleaning semiconductor device fabrication equipment using supercritical fluidsTAIWAN SEMICONDUCTOR MFG·Filed 2008·Application pending·0 cites
- 0853US11153957B2Apparatus and method for generating an electromagnetic radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 19, 2021·0 cites·20 claims
- 0952US2024422888A1Extreme ultraviolet light source with thermal stabilizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1048US10991604B2Method of manufacturing semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 27, 2021·0 cites·20 claims
- 1148US2024004318A1Euv source stabilization apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1248US2010163078A1Spinner and method of cleaning substrate using the spinnerTAIWAN SEMICONDUCTOR MFG·Filed 2008·Application pending·0 cites
- 1340US2006178767A1Systems and methods for inspection controlTAIWAN SEMICONDUCTOR MFG·Filed 2005·Application pending·0 cites
- 1439US2014190857A1Limit member having protection coverGUDENG PREC IND CO LTD·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →