Inventor · disambiguated record
Tzu Han Liu
Also filed as: LIU TZU HAN
9 granted patents·2 pending applications·7 citations·filing 2018–2024
79Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD11
Top patents by PatentIndex Score
11 records- 0194US11340524B2Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 24, 2022·3 cites·20 claims
- 0287US11822231B2Method for removing particles from pellicle and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 21, 2023·1 cites·20 claims
- 0383US12242182B2Method for removing particles from pellicle and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 0479US12405527B2Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 2, 2025·0 cites·20 claims
- 0579US10775694B1Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 15, 2020·1 cites·20 claims
- 0674US2024393679A1Device and method for cleaning pellicle frame and membraneTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0773US11239001B2Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Feb 1, 2022·2 cites·20 claims
- 0870US11294275B2Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 5, 2022·0 cites·20 claims
- 0964US2023333465A1Device and method for cleaning pellicle frame and membraneTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 1063US12189283B2Particle prevention method in reticle podTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
- 1149US11703754B2Particle prevention method in reticle podTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 18, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →