Inventor · disambiguated record
Tzung-Shiun Lu
Also filed as: LU TZUNG-SHIUN
2 granted patents·3 citations·filing 2013–2016
44Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD2
Top patents by PatentIndex Score
2 records- 0176US9373551B2Moveable and adjustable gas injectors for an etching chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 21, 2016·3 cites·19 claims
- 0251US10157805B2Moveable and adjustable gas injectors for an etching chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Dec 18, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →