Inventor · disambiguated record
Tzu-Jung Pan
Also filed as: PAN TZU-JUNG
5 granted patents·3 pending applications·7 citations·filing 2022–2025
68Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD8
Top patents by PatentIndex Score
8 records- 0197US11693326B1System and method for dynamically controlling temperature of thermostatic reticlesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 4, 2023·7 cites·20 claims
- 0285US2025321500A1System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0381US12235593B2System and method for dynamically controlling temperature of thermostatic reticlesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Feb 25, 2025·0 cites·20 claims
- 0481US2025362621A1Semiconductor processing tool and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0577US2025164900A1System and method for dynamically controlling temperature of thermostatic reticlesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0676US12372880B2System and method for detecting debris in a photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 29, 2025·0 cites·20 claims
- 0773US11852978B2EUV lithography system with 3D sensing and tunning modulesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
- 0868US12461454B2Semiconductor processing tool and method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →