Inventor · disambiguated record
Ulrich Egger
Also filed as: EGGER ULRICH
16 granted patents·5 pending applications·62 citations·filing 2002–2007
91Inventor score
Top patents by PatentIndex Score
21 records- 0171US6746877B1Encapsulation of ferroelectric capacitorsINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jun 8, 2004·14 cites·16 claims
- 0267US7015049B2Fence-free etching of iridium barrier having a steep taper angleTOSHIBA KK·Filed 2003·Granted Mar 21, 2006·11 cites·9 claims
- 0362US6762064B1Process for fabrication of a ferrocapacitorINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jul 13, 2004·8 cites·10 claims
- 0461US7071506B2Device for inhibiting hydrogen damage in ferroelectric capacitor devicesINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jul 4, 2006·9 cites·11 claims
- 0558US7504680B2Semiconductor device and mask patternTOSHIBA KK·Filed 2005·Granted Mar 17, 2009·2 cites·2 claims
- 0653US7045837B2Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturingTOSHIBA KK·Filed 2003·Granted May 16, 2006·5 cites·19 claims
- 0752US7042705B2Sidewall structure and method of fabrication for reducing oxygen diffusion to contact plugs during CW hole reactive ion etch processingTOSHIBA KK·Filed 2003·Granted May 9, 2006·3 cites·12 claims
- 0851US6924156B2Method for forming a ferroelectric capacitor deviceINFINEON TECHNOLOGIES AG·Filed 2003·Granted Aug 2, 2005·3 cites·13 claims
- 0949US6897501B2Avoiding shorting in capacitorsINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 24, 2005·4 cites·22 claims
- 1046US7316980B2Method for forming ferrocapacitors and FeRAM devicesINFINEON TECHNOLOGIES AG·Filed 2003·Granted Jan 8, 2008·1 cites·16 claims
- 1146US7098142B2Method of etching ferroelectric devicesINFINEON TECHNOLOGIES AG·Filed 2003·Granted Aug 29, 2006·1 cites·6 claims
- 1246US6734057B2Method of patterning capacitors and capacitors made therebyINFINEON TECHNOLOGIES AG·Filed 2002·Granted May 11, 2004·1 cites·32 claims
- 1340US6785119B2Ferroelectric capacitor and process for its manufactureINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 31, 2004·0 cites·10 claims
- 1439US7001781B2Method for producing a ferroelectric capacitor that includes etching with hardmasksINFINEON TECHNOLOGIES AG·Filed 2003·Granted Feb 21, 2006·0 cites·8 claims
- 1539US6867053B2Fabrication of a FeRAM capacitor using a noble metal hardmaskINFINEON TECHNOLOGIES AG·Filed 2003·Granted Mar 15, 2005·0 cites·7 claims
- 1639US2006226473A1Gate electrode stack and use of a gate electrode stackWU DONGPING·Filed 2005·Application pending·0 cites
- 1738US2009127722A1Method for Processing a Spacer Structure, Method of Manufacturing an Integrated Circuit, Semiconductor Device and Intermediate Structure with at Least One Spacer StructureNOELSCHER CHRISTOPH·Filed 2007·Application pending·0 cites
- 1837US2004171274A1Method for formation of hardmask elements during a semiconductor device fabrication processFiled 2003·Application pending·0 cites
- 1935US7001780B2Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the methodTOSHIBA KK·Filed 2003·Granted Feb 21, 2006·0 cites·6 claims
- 2035US2005084984A1Method for forming ferrocapacitors and FeRAM devicesFiled 2003·Application pending·0 cites
- 2133US2005070030A1Device and method for forming a contact to a top electrode in ferroelectric capacitor devicesFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →