Inventor · disambiguated record
Uwe Behringer
Also filed as: BEHRINGER UWE
4 granted patents·2 pending applications·143 citations·filing 1984–2024
80Inventor score
Top patents by PatentIndex Score
6 records- 0187US4589952AMethod of making trenches with substantially vertical sidewalls in silicon through reactive ion etchingIBM·Filed 1984·Granted May 20, 1986·70 cites·8 claims
- 0276US4751169AMethod for repairing lithographic transmission masksIBM·Filed 1986·Granted Jun 14, 1988·42 cites·14 claims
- 0373US4554458AElectron beam projection lithographyIBM·Filed 1984·Granted Nov 19, 1985·16 cites·7 claims
- 0468US4578587AError-corrected corpuscular beam lithographyIBM·Filed 1985·Granted Mar 25, 1986·15 cites·10 claims
- 0561US2024429781A1Vibrating plate compactor for compacting earth, soil or substrate, and method for operating the same and systemHILTI AG·Filed 2024·Application pending·0 cites
- 0649US2025134330A1Suction device with throttle valve and method for dedusting a filter in such a suction deviceHILTI AG·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →