Inventor · disambiguated record
Uwe Leinhos
Also filed as: LEINHOS UWE
5 granted patents·141 citations·filing 1998–2001
82Inventor score
Files withLAMBDA PHYSIK AG5
Top patents by PatentIndex Score
5 records- 0195US6389045B1Optical pulse stretching and smoothing for ArF and F2 lithography excimer lasersLAMBDA PHYSIK AG·Filed 2000·Granted May 14, 2002·87 cites·39 claims
- 0269US6269110B1Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption linesLAMBDA PHYSIK AG·Filed 1998·Granted Jul 31, 2001·29 cites·16 claims
- 0366US6404795B1Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption linesLAMBDA PHYSIK AG·Filed 2001·Granted Jun 11, 2002·7 cites·25 claims
- 0456US6389048B2Detector with frequency converting coatingLAMBDA PHYSIK AG·Filed 2001·Granted May 14, 2002·5 cites·44 claims
- 0546US6327284B1Detector with frequency converting coatingLAMBDA PHYSIK AG·Filed 1998·Granted Dec 4, 2001·13 cites·28 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →