Inventor · disambiguated record
Uwe Schellhorn
Also filed as: SCHELLHORN UWE
9 granted patents·3 pending applications·77 citations·filing 2002–2012
87Inventor score
Top patents by PatentIndex Score
12 records- 0190US7408652B2Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2005·Granted Aug 5, 2008·12 cites·30 claims
- 0284US6816247B1Moiré method and a system for measuring the distortion of an optical imaging systemZEISS CARL SMT AG·Filed 2002·Granted Nov 9, 2004·36 cites·22 claims
- 0379US8988752B2Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatusZEISS CARL SMT GMBH·Filed 2012·Granted Mar 24, 2015·4 cites·23 claims
- 0469US7400388B2Method for determining distortion and/or image surfaceZEISS CARL SMT AG·Filed 2005·Granted Jul 15, 2008·3 cites·10 claims
- 0569US7019824B2Moire method and measuring system for measuring the distortion of an optical imaging systemZEISS CARL SMT AG·Filed 2004·Granted Mar 28, 2006·11 cites·33 claims
- 0668US8473237B2Method for calibrating a specimen stage of a metrology system and metrology system comprising a specimen stageHUEBEL ALEXANDER·Filed 2010·Granted Jun 25, 2013·4 cites·28 claims
- 0766US8120763B2Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2009·Granted Feb 21, 2012·1 cites·14 claims
- 0857US2009021726A1Device and method for the optical measurement of an optical system by using an immersion fluidZEISS CARL SMT AG·Filed 2008·Application pending·0 cites
- 0956US8416412B2Method for determination of residual errorsSCHELLHORN UWE·Filed 2007·Granted Apr 9, 2013·4 cites·21 claims
- 1055US2012113429A1Device and method for the optical measurement of an optical system by using an immersion fluidWEGMANN ULRICH·Filed 2012·Application pending·0 cites
- 1146US7119910B1Phase shifting wavefront interference methodZEISS CARL SMT AG·Filed 2003·Granted Oct 10, 2006·2 cites·5 claims
- 1245US2010153059A1Apparatus and method for measuring the positions of marks on a maskKLOSE GERD·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →