Inventor · disambiguated record

Valeriy Y. Sukharev

Also filed as: SUKHAREV VALERIY Y

2 granted patents·128 citations·filing 1997–1998

68Inventor score

Technology areasH10P

Files withLSI LOGIC CORP2

Top patents by PatentIndex Score

2 records

0188US5804249AMultistep tungsten CVD process with amorphization stepLSI LOGIC CORP·Filed 1997·Granted Sep 8, 1998·117 cites·18 claims
0243US6016009AIntegrated circuit with tungsten plug containing amorphization layerLSI LOGIC CORP·Filed 1998·Granted Jan 18, 2000·11 cites·24 claims

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