Inventor · disambiguated record
Vincent S. Calia
Also filed as: CALIA VINCENT · CALIA VINCENT S
8 granted patents·98 citations·filing 1975–2001
87Inventor score
Top patents by PatentIndex Score
8 records- 0169US6133577AMethod and apparatus for producing extreme ultra-violet light for use in photolithographyADVANCED ENERGY SYST·Filed 1997·Granted Oct 17, 2000·39 cites·45 claims
- 0262US3962694AMethod and apparatus for monitoring an electrically actuated toolGRUMMAN AEROSPACE CORP·Filed 1975·Granted Jun 8, 1976·15 cites·14 claims
- 0357US6552350B2System and method for providing a lithographic light source for a semiconductor manufacturing processADVANCED ENERGY SYST·Filed 2001·Granted Apr 22, 2003·5 cites·27 claims
- 0449US6437349B1Fluid nozzle system and method in an emitted energy system for photolithographyADVANCED ENERGY SYST·Filed 2000·Granted Aug 20, 2002·2 cites·18 claims
- 0549US6190835B1System and method for providing a lithographic light source for a semiconductor manufacturing processADVANCED ENERGY SYST·Filed 1999·Granted Feb 20, 2001·12 cites·6 claims
- 0646US6105885AFluid nozzle system and method in an emitted energy system for photolithographyADVANCED ENERGY SYST·Filed 1998·Granted Aug 22, 2000·11 cites·13 claims
- 0742US6065203AMethod of manufacturing very small diameter deep passagesADVANCED ENERGY SYST·Filed 1998·Granted May 23, 2000·10 cites·14 claims
- 0835US4933546AOrifice ring ion beam neutralizerGRUMMAN AEROSPACE CORP·Filed 1988·Granted Jun 12, 1990·4 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →