Inventor · disambiguated record
Vikas R. Sheth
Also filed as: SHETH VIKAS R
2 granted patents·1 pending application·7 citations·filing 2004–2012
51Inventor score
Top patents by PatentIndex Score
3 records- 0178US7670760B2Treatment for reduction of line edge roughnessFREESCALE SEMICONDUCTOR INC·Filed 2006·Granted Mar 2, 2010·6 cites·19 claims
- 0244US7176130B2Plasma treatment for surface of semiconductor deviceFREESCALE SEMICONDUCTOR INC·Filed 2004·Granted Feb 13, 2007·1 cites·23 claims
- 0331US2014061910A1Semiconductor device structures and methods for copper bond padsLEE CHU-CHUNG·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →